RADIAL LINE SLOT ANTENNAS FED BY A RECTANGULAR WAVEGUIDE ... RADIAL LINE SLOT ANTENNAS FED BY A RECTANGULAR WAVEGUIDE THROUGH A CROSSED SLOT Kaoru SUDO∗, Takuichi HIRANO, Jiro HIROKAWA, and Makoto ANDO Department of Electrical and Electronic Engineering, Tokyo Institute of Technology 2-12-1, O-okayama, Meguro-ku, Tokyo, 152-8552, Japan E-mail: ksudo@antenna.ee.titech.ac.jp 1 Introduction LOW ELECTRON TEMPERATURE MICROWAVE SURFACE-WAVE PLASMA (SWP ... FIELD OF THE INVENTION. The invention relates to plasma processing with microwave (MW) plasmas, particularly surface wave plasmas (SWP), for example as produced with a radial line slot antenna, and more particularly, to a method and apparatus providing relatively low electron temperature and plasma uniformity Multiphysics Coupling Simulation of Silicon Nitride CVD Using ... The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane and ammonia mixture are addressed. Conformal doping of topographic silicon structures using a ...
Analysis of a high power microwave radial line slot …
Based on the Radial Line Slot Antenna (RLSA) microwave plasma developed for semiconductor processes by Professor Tadahiro Ohmi at Tohoku University, the Trias SPA uses the unique Slot Plane Antenna (SPA) plasma generating technology established by TEL, after long years of cultivating plasma technology. Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. APS -66th Annual Gaseous Electronics Conference - Event ... The radial line slot antenna plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Masahiro Horigome | Tokyo Electron, Tokyo | Electrical ... Fin extension doping for 10 nm front end of line technology requires ultra-shallow high dose conformal doping. In this paper, we demonstrate a new radial line slot antenna plasma source based ...
This paper presents a high-gain radial line slot array (RLSA) antenna. This single-layer circularly polarised RLSA antenna has been designed with several thousand of slots on the radiating aperture. The far-field results indicate excellent pattern qualities including a peak gain of 36.7 dBic at 21.2 GHz.
plasma doping. Concentration depth profiles associated with arsenic plasma doping using a radial line slot antenna plasma source22 are includedinFig.1 [Secondary Ion Mass Spectrometry (SIMS)] a)Authors to whom correspondence should be addressed. Electronic addresses: peter.ventzek@us.tel.com and gshwang@che.utexas.edu Near-Field Distribution of Radial Line Slot Antenna for ... the antenna aperture in this case. A radial line slot antenna (RLSA) for surface-wave-coupled plasma (SWP) is a promising candidate to this end. A novel slot arrangement in the aperture, consisting of densely arrayed transverse slots, was fabricated and tested.
Radial Line Slot Antenna. Academic & Science » Electronics. Add to My List Edit this Entry Rate it: (5.00 / 4 votes) Translation Find a translation for Radial Line ...
Plasma and Ion Sources in Large Area Coatings: A Review Plasma and Ion Sources in Large Area Coatings: A Review André Anders Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 Abstract Efficient deposition of high-quality coatings often requires controlled application of excited or ionized particles. These particles are either condensing (film-forming) or Simulations of the Plasma Structure of a Radial Line Slotted ... The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. DIAGNOSIS TECHNIQUES FOR PLANAR ANTENNAS USING ITERATIVE ... source reconstruction of a K-band radial line slot antenna (RLSA), and measured results are presented, compared with the designed data. Of course, this algorithm can be also be used for other kind of antennas as patch arrays. 1. Introduction One of the important parameters in antenna diagnosis is the field distribution on the antenna aperture.
The invention relates to plasma processing with microwave (MW) plasmas, particularly surface wave plasmas (SWP), for example as produced with a Radial Line Slot Antenna, and more particularly, to a method and apparatus providing relatively low electron energies and plasma uniformity near a treated substrate. BACKGROUND OF THE INVENTION
APS -66th Annual Gaseous Electronics Conference - Event ... The radial line slot antenna plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Exploration COMSOL in Modeling RLSATM CVD Processes
Radial line slot antenna plasma source